Optimized Design of 2.4 m Primary Mirror Reflective Film Thickness Uniformity

Film thickness uniformity is an important indicator for the preparation of high-performance optical films. In order to further improve the uniformity of the film thickness of the 2.4 m primary mirror reflective film, an optimization scheme for the film thickness uniformity of the large-aperture telescope coating is designed. Based on the cosine distribution law followed by vacuum thermal evaporation, combined with the geometry of ZZ3200 vacuum coater and the actual needs of telescope coating, a film thickness calculation program is written to simulate the theoretical distribution of film thickness. The film thickness optimization design method and optimization results are given. Method 1:Add a correction mask at a suitable position inside the evaporation source,the results show that the radius of curvature of the mask is installed within 3 mm, and the Peak to Valley value of film thickness inhomogeneity decreases from 15% to 4% without mask, this method has certain universality, but the installation position of the mask should be accurately controlled; Method 2:Combined with the circular hole structure in the middle of the reflection primary mirror, the double ring evaporation source is designed, and the results show that when the center distance between the inner and outer ring evaporation sources is 10 cm and 130 cm, respectively, and the number of evaporation sources in the outer ring is 12 times that of the inner ring, the PV value of film thickness uniformity is 1.85%, which is designed for the mirror with a round hole in the center, and is suitable for most reflective astronomical telescope coatings.