Technical Elements of Nanometrology

Yeh Hsien-Chi

Publications of the Yunnan Observatory > 2002 > 0(3): 101-116.

Yeh Hsien-Chi. Technical Elements of Nanometrology[J]. Publications of the Yunnan Observatory, 2002, (3): 101-116.

Citation:

Yeh Hsien-Chi. Technical Elements of Nanometrology[J]. Publications of the Yunnan Observatory, 2002, (3): 101-116.

Citation:

Yeh Hsien-Chi. Technical Elements of Nanometrology[J]. Publications of the Yunnan Observatory, 2002, (3): 101-116.

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Technical Elements of Nanometrology

Yeh Hsien-Chi

Center for Measurement Standards, Industrial Technology Research Institute, Building 16, 321 Kuang Fu Road, Section 2, Taiwan Hsinchu 300

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Received Date: November 30, 2001
Published Date: July 14, 2002

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Abstract

Abstract

In this lecture, we discuss the fundamental technical elements of nanometrology--the nanoscale, the nanoguide, the nanodrive, and the nanoprobe, review our research results at Tsing Hua University, and present some new results at Center for Measurement Standards/ITRI. In order to meet the precision requirement of laser metrology for ASTROD, and to realize the new definition of kilogram, we have studied the sub-nanometer laser metrology and built up a nanopositioning system consisting of heterodyne interferometer, flexure stage, and VMEbus real-time control system. We also integrated a nanopositioning system with a home-made scanning tunneling microscope to construct a calibrated STM that could provide the measurement of critical dimension of microstructure traceable to the SI unit of length. These two topics are the main focus of our discussion.
- ASTROD,
- Nanometrology,
- Subnanometer Laser Metrology,
- Nanopositioning,
- Flexure Stage,
- canning Tunneling Microscopy (STM)

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