An Alignment and Testing Method of 8-10μm Imaging Terminal System of AIMS

In order to meet the requirements of high-precision alignment of the 8-10μm vacuum cooling imaging terminal system of AIMS, a method of broadband interference for alignment and test based on mid-infrared tunable laser source is proposed. First of all, the Twyman-Green interferometer is used to complement the lack of coherence of the light source by taking advantage of its adjustable reference arm,so that the 8-10μm broadband interferometry can be realized. Secondly, the optical design of the interferometer is completed, which can handle the wavefront quality of 8-10μm band and visible light band at the same time, so as to solve the difficulty of the interferometer's self adjustment caused by invisibility. The design results show that the use of visible laser for self-installation and adjustment of the interferometer can achieve a wavefront accuracy of RMS 0.05λ@633nm. In the detection band of 8-10μm, the RMS value of the interferometer wavefront can be better than 0.001λ, which can meet the detection requirements of the system under test. Finally, the assembly and adjustment process of the 8-10μm optical system is simulated based on the reverse optimization method.